LEAKAGE TEST METHOD FOR CLEAN ROOM AIR FILTER
نویسندگان
چکیده
منابع مشابه
Volatile Organic Compounds Monitoring for Semiconductor Foundry Clean Room Air
Air samples were collected in consecutive days using Summa canisters from semiconductor foundry clean rooms and air entrances. By coupling a NuTech preconcentrator with an Agilent GC-MS, an optimized method for qualitative and quantitative analysis of VOC compounds was developed. Method detection limit (MDL), blank spike (BS) and blank spike duplicate (BSD), etc. were estimated for method valid...
متن کاملارزیابی پارامترهای عمل‌کردی اتاق‌های پاک (مطالعه موردی در یک صنعت دارویی)
Introduction: Nowadays, many modern industries require an environment with no contamination by particles and bacteria. An enclosed clean room environment is a place where parameters such as airborne particles, temperature, humidity, air pressure and air flow pattern is controlled. The aim of this study was to evaluate functional parameters of a clean room in a selected pharmaceutical industry....
متن کاملWhy Is Clean Air Clean?
Air exhibiting very low concentrations of light-scattering aerosol particles is occasionally observed even in industrialized regions. Evidence is presented that this very clean air results from highly efficient removal of aerosol particles coupled to the removal of water in precipitation.
متن کاملEnergy Saving System for Air Conditioning of Clean Room for Semiconductor Factory (Estimation of FMU System)
The total power consumption of all semiconductor plants exceeds 100 million kWh per year, with about 43% of this consumption to operate air conditioning facilities. This high power consumption is due to the requirement of the cleanliness kept for clean rooms, with extremely high power consumed to the air transferring power. Oki developed the fan module unit (FMU) type air conditioning system to...
متن کاملTen principles for clean air.
T he European ‘‘Year of the Air’’ 2013 will be upon us soon: over the next several months, the European Union (EU) will revise its main air pollution control policies. Lack of clean air is one of the most important environmental threats to public health in Europe today. The European Respiratory Society Environment and Health Committee (www.ersnet.org) has developed 10 concise principles for cle...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Architecture and Planning (Transactions of AIJ)
سال: 1999
ISSN: 1340-4210,1881-8161
DOI: 10.3130/aija.64.53_1